单双层加热结构对纳米金刚石膜形貌及摩擦性能的影响  

Development of Single-and Double-Layered Hot Filament for Growth of Diamond Nano-Film

作　　者：丰杰 李建国[1] 梅军[1] 胡东平[1] 

机构地区：[1]中国工程物理研究院总体工程研究所,绵阳621900 [2]中南大学材料科学与工程学院,长沙410083

出　　处：《真空科学与技术学报》2010年第5期474-478,共5页Chinese Journal of Vacuum Science and Technology

基　　金：中国工程物理研究院科学技术基金资助项目(2005Z0805)

摘　　要：采用热丝化学气相沉积方法研究了CH4/H2体系不同沉积气压以及不同加热结构对金刚石薄膜组成及形貌的影响,并对其摩擦磨损性能进行了检测。结果表明:通过降低反应气体的压力和选择适当的碳源浓度的方法,可以获得纳米金刚石薄膜;采用双层丝加热,可以使颗粒尺寸及表面粗糙度控制在12 nm左右,并具有更低的摩擦系数,更好的耐磨性能。The single-and double-layered hot filaments have been successfully developed and installed in the labmade, hot filament chemical vapor deposition （HFCVD） setup. The diamond films were grown by HFCVD with the newlydeveloped filaments to evaluate its strengths and weaknesses. The impacts of the deposition conditions on the grain size of the film were studied. Diamond nano-film can be deposited at a low pressure of reactive gasses （CH4/CH2）. The microstruetures and morphologies of the films were characterized with scanning electron microscopy, atomic force microscopy and Raman spectroscopy. The results show that the double-layered hot filament significantly improves the microstructures and mechanical properties of the films. For example, the film has more compact, smoother surface with a roughness about 12 nm, a lower friction coefficient and a higher wear resistance.

关 键 词：纳米金刚石 薄膜 热丝化学气相沉积 摩擦系数 

分 类 号：O484[理学—固体物理]