铝基复合材料表面多层复合厚膜的研究  

Deposition and Characterization of Multi-Layered Gradient Membrane on Aluminum-Based Composite Substrate

作　　者：彭丽平[1] 王兆松[2] 李剑锋[3] 吕世功[2] 王春[2] 武洪臣[1] 巩水利[1] 李国卿[2] 

机构地区：[1]北京航空制造工程研究所高能束流加工技术重点实验室,北京100024 [2]大连理工大学三束材料重点实验室,大连116024 [3]大连交通大学,大连116028

出　　处：《真空科学与技术学报》2010年第5期505-509,共5页Chinese Journal of Vacuum Science and Technology

摘　　要：对含50%AlN颗粒的铝基复合材料进行预处理后,在其表面依次采用浸锌化学镀镍工艺制备Ni-P过渡层,采用脉冲偏压磁过滤多弧离子镀工艺沉积硬质Ti/TiN调制周期膜,采用脉冲等离子体化学气相沉积工艺制备含氢类金刚石(DLC)膜等工艺最后形成了多层复合薄膜体系。利用X射线衍射仪、扫描电子显微镜、光谱仪、原子力显微镜、微载荷显微硬度仪、摩擦磨损试验机等设备分析了复合薄膜的组织结构、膜层形貌、截面形貌、显微硬度和摩擦系数等性能特点。测试表明:铝基复合材料/Ni-P层/Ti/TiN调制周期膜/含氢DLC膜这一梯度膜系具有结构交替变化,相邻界面形成混合层,性能梯度分布,硬度逐渐增加,摩擦系数小的特点。该复合工艺能够有效地解决铝基复合材料上制备硬质厚膜的热适配和晶格错配度大的难题,制备薄膜具有良好的膜基结合性能。A novel technique was developed to deposit the multi-layered gradient membrane on aluminum-based composite substrates, fabricated with 50% AlN powder. In the technique, first, the Ni-P transition layer was deposited by zinc immersion chemical plating; next, the Ti/TiN periodically modulated layers were grown by pulsed-bias, magnetically- filtered,multi-arc ion plating; and finally, the amorphous hydrogenated diamond-like carbon （a-c： H DLC） layer was fabricated by pulsed plasma enhanced chemical deposition. The microstructures and mechanical properties of the membrane were characterized with X-ray diffraction, scanning electron microscopy, atomic force microscopy, Raman spectroscopy, and conventional surface probes. The results show that fairly strong adhesion exists at the interface of the soft substrate and the hard membrane, and that the membrane partly solves the problems, such as thermal and lattice mismatches between soft Al-based composite snhstrate and hard films. Besides, higher surface hardness, lower friction coefficient, as well as the periodic structured multi-layers and property gradient distribution, were observed.

关 键 词：多层复合膜 Ti/TiN调制周期膜 类金刚石膜 摩擦系数 结合力 

分 类 号：O484.1[理学—固体物理]