碳纳米管场效应晶体管设计与应用  

Design and application of carbon nanotube FETs

作　　者：许高斌[1,2] 陈兴[1,2] 周琪[3] 王鹏[1,2] 

机构地区：[1]安徽省微电子机械系统工程技术研究中心,合肥230009 [2]合肥工业大学电子科学与应用物理学院,合肥230009 [3]合肥工业大学材料科学与工程学院,合肥230009

出　　处：《电子测量与仪器学报》2010年第10期969-978,共10页Journal of Electronic Measurement and Instrumentation

基　　金：安徽省自然科学基金(编号:090414199)资助项目;中央高校基本科研业务费专项资金(编号:2010HGZY0004;2010HGXJ0224)资助项目

摘　　要：碳纳米管具有一些独特的电学性质,在纳米电子学有很好的应用前景。随着纳米技术的发展,新的工艺技术也随之产生。纳米器件的"由下至上"制作工艺,是在纳米技术和纳米材料的基础之上发展起来的,在新工艺基础之上,可以利用纳米管、纳米线的性质制作成各种新的电子器件。由于碳纳米管可以和硅在电子电路中扮演同样的角色,随着基于碳纳米管的纳米电路研究的深入发展,电子学将在真正意义上从微电子时代进入纳电子时代。从分析碳纳米管分立场效应晶体管典型结构特点入手,分析阐述了碳纳米管构建的典型纳米逻辑电路结构特征及碳纳米管在柔性纳米集成电路方面的应用。Carbon nanotube has many extraordinary electrical properties and extensive application foreground on nano electronics.With the development of nanotechnology,new process technique is generated.And the bottom-up fabrication process is developed based on nano technique and nano materials,then various new electron devices is constructed by using the properties of nanotubes and nanowires.Since the CNTs can act same roles in electronic circuit as Si material,and with the profound development of research of nano-ICs based on CNTs,the electronics will turn into the nanoelectronic era truly from the microelectronic era.In this paper,the feature of typical structure of nano electronic devices based on CNTs,CNTs field effect transistor（FET）,is discussed,the characteristic of typical structure of logic-gate circuits based on CNT-FETs is represented,and the application of CNTs on flexible nano ICs is also described.

关 键 词：碳纳米管 场效应晶体管 纳米逻辑门电路 柔性纳米集成电路 纳米电子学 

分 类 号：O484[理学—固体物理]