一种可用于雨量测量的压力传感器  

Pressure sensor used in measuring rain

作　　者：余辉洋[1] 顾兴莲[1] 秦明[1] 

机构地区：[1]东南大学微电子机械系统教育部重点实验室,南京210096

出　　处：《东南大学学报（自然科学版）》2010年第3期522-526,共5页Journal of Southeast University：Natural Science Edition

基　　金：国家高技术研究发展计划(863计划)资助项目(2007AA04Z306)

摘　　要：设计了一种可用于测雨压的压力传感器,给出了传感器结构及其微加工流程.传感器由3×3的压敏电容阵列组成,压敏电容将压力信号转换成电容信号,通过检测雨水冲击作用间接测量雨量的大小.基于弹性力学理论建立了传感器的力学模型,并与ANSYS有限元分析软件进行比较,结果表明理论模型具有较好的精度.介绍了传感器制作的微加工工艺流程并采用硅橡胶对传感器进行防水密封封装,并给出了制作完成后传感器的测试结果,从测试结果可以看出该雨量传感器的灵敏度可以达到2.255 7fF/Pa.A novel MEMS（micro electro mechanical system） capacitive rain sensor is designed,and the structure and the micro-fabrication process of which is given.The sensor consists of a 3×3 capacitor matrix.The sensitive capacitances of the sensor change the pressure signal into the capacitive signal and detect the strength of the rain through detecting the impact effect of the rain.The model of the sensor is established based on the elasticity principle and then are compared the theoretical analysis results with the ANSYS FEA（finite element analysis） simulation.The results indicate that the theoretical model has high precision.After that,the fabrication processing is introduced,and this rain sensor is packaged by silica gel to protect the sensor from water.A test is given on this rain sensor,and the test results indicate that the sensitivity of this sensor can reach 2.255 7 fF/Pa.

关 键 词：MEMS 电容 雨量传感器 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]