电容式压力传感器的线性化校正与温度补偿  

Linear Calibration and Temperature Compensation of Capacitive Pressure Sensor

作　　者：刘沁[1,2] 周东旭[1] 张治国[2] 匡石[2] 李新[1] 

机构地区：[1]沈阳工业大学,辽宁沈阳110870 [2]沈阳仪表科学研究院,辽宁沈阳110043

出　　处：《仪表技术与传感器》2010年第11期1-2,6,共3页Instrument Technique and Sensor

摘　　要：论述了利用最小二乘法和牛顿插值法对电容式压力传感器的非线性和温度影响进行校正和补偿的方法。对电容式压力传感器信号存在非线性和温漂问题的机理进行了分析。采用最小二乘法对传感器输出信号进行非线性校正,然后利用牛顿插值法进行温度补偿。测试结果表明,在-40~85℃温度范围内实现了0.04%的测量精度。This paper Discussed the use of least square method and the Newton interpolation method on the linear calibration and temperature compensation of capacitive pressure sensor.Mechanism which the nonlinear of capacitive pressure sensor signal and the temperature drift problem was analyzed.Using the least square method to correct the nonlinear of sensor output signal,and then using Newton interpolation method for temperature compensation.The results show that from -40 ℃ to 85 ℃ temperature range,it achieves 0.04% accuracy.

关 键 词：电容式压力传感器 最小二乘法 牛顿插值法 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]