MEMS镍平面弹簧非线性力学性能仿真及研究  

Simulation and Study of Nonlinear Mechanical Properties for MEMS Ni Planar Springs

作　　者：隋灵禾[1] 戴旭涵[1] 王佩红[1] 赵小林[1] 

机构地区：[1]上海交通大学微米/纳米加工技术国家级重点实验室,上海200240

出　　处：《微纳电子技术》2010年第12期736-741,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(50977056)

摘　　要：工程应用中,平面微弹簧存在弹性系数的非线性现象且难以被忽略,弹簧结构的几何非线性是引起这种现象的主要原因。针对特定形状的弹簧运用Ansys软件进行了非线性有限元静力学仿真,计算出弹簧弹性力F与弹性形变x之间的对应关系,并与采用MEMS微细加工技术制得弹簧样品实测实验结果比较,相对误差低于3.2%,验证了分析模型的可靠性。而后设计了5种不同平面形状的微弹簧,仿真计算它们的力学性能曲线,以及改变弹簧臂宽度厚度后的力学性能曲线,分别进行比较以讨论影响非线性的主要因素,为弹簧的设计工作提供参考依据。The nonlinear phenomena of the elastic coefficient for the planar micro spring can not be ignored in engineering application,and the geometric nonlinearity is considered as the main factor leading to the phenomena.The nonlinear finite element simulation of the static dynamics for the spring with certain shape was performed by Ansys software,and the corresponding relationship between the spring elastic force F and the elastic deformation x was calculated.Furthermore,the comparison of the simulation result and the testing result for the prepared spring samples with MEMS microfabrication technology was made.The result shows that the relative error is less than 3.2%,proving the reliability of the analytical model.Base on the analysis,five kinds of the springs with different planar shapes were designed,and the simulation calculations for their mechanical performance curves before and after the modification of the spring arm width were carried out.All the curves were analysed respectively to figure out the main factors that affect the nonlinearity,providing a reference for the further spring design.

关 键 词：微电子机械系统(MEMS) 平面微弹簧 弹性系数 几何非线性 ANSYS 

分 类 号：TH703[机械工程—仪器科学与技术] O343[机械工程—精密仪器及机械]