DRIE工艺误差对MEMS梳齿谐振器频率的影响  

Influence of the DRIE Process Error on the Frequency of MEMS Comb-Drive Resonators

作　　者：王强[1,2] 高杨[2,3] 贾小慧[4] 柏鹭[4] 

机构地区：[1]西南科技大学制造科学与工程学院,四川绵阳621010 [2]中国工程物理研究院电子工程研究所,四川绵阳621900 [3]重庆大学光电技术及系统教育部重点实验室,重庆400044 [4]西南科技大学信息工程学院,四川绵阳621010

出　　处：《微纳电子技术》2010年第12期776-780,共5页Micronanoelectronic Technology

基　　金：中国工程物理研究院科技发展基金重点课题(2008A0403016);四川省教育厅重大培育项目(07ZZ038);西南科技大学研究生教改项目(2007XJJG33);教育部访问学者基金项目(无编号)

摘　　要：针对深反应离子刻蚀(DRIE)工艺加工高深宽比梳齿电容存在侧壁倾斜角的情况,分析了该倾斜角对梳齿谐振器频率的影响。为了使设计的梳齿谐振器频率符合应用要求,推导出了梳齿谐振器在正负侧壁倾斜角θ下的谐振频率计算公式。利用ANSYS Workbench11.0平台,分别对侧壁倾斜角为0°,0.2°,0.35°和0.5°的情形进行了有限元建模与模态仿真。仿真结果表明:随着正倾斜角的增大,谐振频率减小;负倾斜角增大时,谐振频率增大,且一阶模态振形的平稳程度越差。比较数值仿真结果与考虑了正负倾斜角误差的梳齿谐振器谐振频率计算公式计算结果对比,吻合较好。In view of the practical situation that there is a sidewall inclination angle of the comb capacitor with a high aspect ratio through the deep reactive ion etching（DRIE）process,the influence of this inclination angle on the resonance frequency of the comb resonator was analyzed.In order to make the design for the resonance frequency of the comb resonator meet the practical requirement,the calculation formula for the resonance frequency of the comb resonator was derived with the positive or negative sidewall inclination angle of θ.Besides that,the finite element modeling and the modality simulation were carried out using ANSYS Workbench 11.0 platform with the sidewall inclination angles of 0°,0.2°,0.35° and 0.5°,respectively.The simulation result indicates that the resonance frequency of the comb-drive resonator reduces with the increase of the positive sidewall inclination angle θ;and increases with the increment of the negative sidewall inclination angle while the stability of the first-order modality vibration mode deteriorates.The simulation results agree well with the calculated results through the formula for the resonance frequency of the comb-drive resonator with the positive or negative inclination angle error.

关 键 词：微电子机械系统(MEMS) 梳齿谐振器 深反应离子刻蚀 高深宽比 倾斜角 谐振频率 

分 类 号：TH703[机械工程—仪器科学与技术] TN305.7[机械工程—精密仪器及机械]