超精密隔振系统的建模与参数辨识  

Modeling and Parameter Identification of the Ultra-precision Vibration Isolation System

作　　者：董卡卡[1] 蒲华燕[1] 徐振高[1] 陈学东[1] 

机构地区：[1]华中科技大学数字制造装备与技术国家重点实验室,武汉430074

出　　处：《武汉理工大学学报》2011年第1期125-129,133,共6页Journal of Wuhan University of Technology

基　　金："973"计划项目(2009CB724205)

摘　　要：根据超精密隔振器的内部结构和隔振系统的布置形式,建立了超精密隔振系统的动力学模型,并在此基础上推导出理论频响函数。提出了隔振系统的频响测试方法,根据测试数据的特征值,计算获得了隔振系统动力学参数的初始值。采用参数调整法,使理论频响曲线不断逼进实验频响曲线,从而辨识出隔振系统的动力学参数。实验和误差分析结果验证了动力学模型的有效性和辨识参数的可信性。In this paper,according to the internal structure of the ultra-precision vibration isolator and the arrangement of the isolation system,dynamics model of the ultra-precision vibration isolation system is established.And on this basis,theoretical frequency response function is derived.The method of vibration isolation system frequency response test is proposed,and the initial value of dynamic parameters of the isolation system is calculated,according to the eigenvalue of the test data.Parameter adjustment method is used to continuously pressing the theoretical frequency response curve of experimental frequency response curve,and to identify the dynamic parameters of the isolation system.Experiments and error analysis results show the effectiveness of the dynamic model and the credibility of the identified parameters.

关 键 词：超精密隔振系统 动力学模型 频响函数 参数辨识 误差分析 

分 类 号：TB535[理学—物理]