改善数字式加速度计处理电路温度稳定性的一种方法  

One Method to Improve the Temperature Stability of Processing Circuit of Digital Accelerometer

作　　者：张斌[1] 王昊[1] 张霞[1] 胡世昌[1] 金仲和[1] 

机构地区：[1]浙江大学信息与电子工程系,杭州310027

出　　处：《传感技术学报》2010年第12期1722-1727,共6页Chinese Journal of Sensors and Actuators

基　　金：国家重点基础研究发展规划项目资助(973项目)(2006CB300405)

摘　　要：介绍了一种电容式微机械加速度计的数字化处理电路,并重点介绍了数模转换器和模数转换器的温度特性。提出通过将调幅信号与载波信号进行相除运算,来显著的改善由于模数转换器和数模转换器引起的加速度计系统稳定性恶化现象。根据载波信号具有的一些与调幅信号不同的特性,运用方波解调的思想,设计了简化的数字方波解调算法对载波信号进行数字解调,这个算法可以节约大量的FPGA硬件资源,并且可以在解调时实现相位自动对准。A digital processing system based on a capacitive MEMS accelerometer is introduced,and the analysis is concentrated on the temperature characteristic of DA and AD.That proposal obviously improves the worsening phenomenon about stability in the accelerometer system due to DA and AD through the division operation of amplititude-modulated signal and carrier signal.According to carrier signal having different characteristic with amplititude-modulated signal,and by using square-wave demodulation thought the simplified digital square-wave demodulation algorithm was designed to carry on the digital demodulation to the carrier signal.By the new algorithm,we can save the massive FPGA hardware source,and it has the ability of phase self-aligning when demodulating.

关 键 词：微电子机械系统 加速度计 现场可编程门阵列 数模转换器 模数转换器 

分 类 号：TH811[机械工程—仪器科学与技术] TH824.4[机械工程—精密仪器及机械]