基于光诱导介电泳的微粒自动化操作实验研究  

Automatic Manipulation of Polystyrene Beads via Optically-Induced Dielectrophoresis

作　　者：王淑娥[1,2] 曲艳丽[1] 董再励[1] 周磊[1] 刘柱[1] 

机构地区：[1]中国科学院沈阳自动化研究所机器人学国家重点实验室,沈阳110016 [2]中国科学院研究生院,北京100049

出　　处：《微纳电子技术》2011年第2期132-137,共6页Micronanoelectronic Technology

基　　金：机器人学国家重点实验室自主课题(2009Z02)

摘　　要：采用等离子体增强化学气相沉积方法(PECVD)制备了氢化非晶硅(a-Si∶H)光电导薄膜,并利用双面胶技术封装ODEP芯片。构建了包括光投影模块和视频监控模块的ODEP自动化操作实验平台。以聚苯乙烯微粒为操作对象,进行微米尺度粒子的ODEP自动化操作实验,并深入研究了交流电压、投射光颜色和光电极形状对微粒运动速度的影响。实验结果表明,在交流电压频率和投射光颜色相同的条件下,粒子的运动速度与交流电压的幅值成线性关系,施加的交流电压幅值越大,微粒的运动速度越大。在交流电压的幅值和频率相同的条件下,投射光为白色时,粒子的运动速度最大;投射光为蓝色时,粒子的运动速度最小。当投射光为白光,电压为20V,频率为20kHz时,10μm和20μm聚苯乙烯微粒的最大运动速度分别为143μm/s和158μm/s。The hydrogenated amorphous silicon（a-Si∶H）,used as a photoconductive layer,was deposited on the indium-tin-oxide（ITO）glass by plasma enhanced chemical vapor deposition（PECVD）.Then the optically-induced dielectrophoresis（ODEP）chip was integrated utilizing double-adhesive.A ODEP automatic experimental setup with a light projection and a visual monitoring modules for the microparticle manipulation was established.The experiments of automatically manipulating micro-scale polystyrene beads were carried out.Furthermore,the effects of the AC voltage,projection light color and geometry shape of the photoelectrode on the bead velocity were investigated deeply.The results show that the bead velocity is proportional to the magnitude of the AC voltage while the frequency is constant and the projection light is in the same color.The bead velocity will increase with the increment of the voltage.The white projection light causes the highest bead velocity,and the blue projection light causes the lowest velocity when the magnitude and frequency of the AC voltage are set to be constant.While the projection light is white and the voltage is 20 V at 20 kHz,the highest velocities of 10 μm and 20 μm polystyrene beads are 143 μm/s and 158 μm/s,respectively.

关 键 词：光诱导介电泳 氢化非晶硅 光电导薄膜 自动化操作 ODEP芯片 虚拟电极 

分 类 号：O648.123[理学—物理化学]