基于ZPETC和CCC的直驱XY平台高精度控制  

High Precision Control Based on Zero Phase Error Tracking Controller and Cross-coupled Controller for Direct Drive XY Table

作　　者：赵希梅[1] 郭庆鼎[1] 

机构地区：[1]沈阳工业大学电气工程学院,沈阳110870

出　　处：《组合机床与自动化加工技术》2011年第2期83-85,共3页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：辽宁省科技厅博士科研启动基金项目(20091056);辽宁省教育厅科学技术研究项目(L2010400)

摘　　要：针对直接驱动XY平台轮廓加工中存在的电气——机械延迟、系统参数不确定性及两轴驱动系统参数不匹配等因素的影响,提出了将零相位误差跟踪控制器(ZPETC)与交叉耦合控制器(CCC)相结合的控制策略对两轴的运动进行协调控制,实现跟踪误差与轮廓误差同时减小。ZPETC作为前馈跟踪控制器,克服了伺服滞后,使系统实现准确跟踪,减小了跟踪误差;CCC作用于两轴之间,用以增加两轴间的匹配程度,以减小轮廓误差。仿真和实验结果表明所提出的控制方案具有较好的跟踪性和鲁棒性,进而大大提高了跟踪精度和轮廓精度。For the existing problems that influence the precision of the contour machining in direct drive XY table high precision contour machining,such as the electric-machine delay,the uncertainty of the system parameters,parameters unmatched of the double axis drive system and disturbances and so on.The control strategy combining zero phase error tracking controller（ZPETC） with cross-coupling controller（CCC） is presented to implement coordinate control for double axis and improve tracking error and contour error.ZPETC is served as the feed-forward controller to improve the fast tracking performance of the system and overcome the servo delay,thus the exactly tracking of the system is implemented.The tracking error is reduced.Cross-coupling controller is used to increase the matched degree among axes.The contour error is diminished.The simulation and experimental results show that the proposed control scheme is effective.The tracking precise and contour precise are greatly improved.

关 键 词：XY平台 ZPETC 交叉耦合控制器 轮廓误差 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]