收集环境振动能微压电悬臂梁的制作工艺与测试  

Manufacturing Technique and Measurement of Micro-Piezoelectric Cantilever Beam for Ambient Vibration Energy Collection

作　　者：褚金奎[1] 李涛[1] 韩冰峰[1] 熊叶胜[1] 

机构地区：[1]大连理工大学辽宁省微纳米技术及系统重点实验室,大连116023

出　　处：《纳米技术与精密工程》2011年第1期1-5,共5页Nanotechnology and Precision Engineering

基　　金：辽宁省科学技术基金资助项目(20072183);教育部新世纪优秀人才计划资助项目(NEC-04-0266)

摘　　要：研制长寿稳定电源已经成为微型无线传感网络中亟待解决的关键技术问题,现有的化学电池容量有限,需要不断地逐个更换耗尽的电池,难以满足无线传感网络的实际应用.提出了利用压电材料的机电耦合特性收集环境振动能,设计了一种用来收集环境振动能的压电微悬臂梁结构,介绍了用MEMS工艺制作带质量块的硅基压电悬臂梁微电源的工艺流程.质量块可以降低器件的谐振频率,并提高输出电功率.最后,对制作的微压电悬臂梁进行了固有频率测试以及静态和准静态标定实验.Long life and stable batteries in the wireless sensors nodes of the micro system are urgently demanded as the chemical batteries are limited in capacity and have to be replaced constantly,which cannot meet the requirement of practical applications.A new type of micro generator which utilizes electric-mechanical coupling characteristics of piezoelectric materials to collect ambient vibration energy was proposed and a micro piezoelectric cantilever structure was designed to collect ambient vibration energy.The MEMS fabrication process for the micro piezoelectric cantilever beam with the mass block was introduced,which could help decrease the natural frequency of the device and improve the output electric power.Finally,the natural frequency of the manufactured piezoelectric micro-cantilevers was measured and the static and quasi-static calibrations were carried out.

关 键 词：微电源 压电悬臂梁 MEMS PZT 

分 类 号：TP21[自动化与计算机技术—检测技术与自动化装置]