一种用于气体检测MEMS电容式红外发光强度探测器  

A Kind of MEMS Capacitive Infrared Detector for Gas Detection

作　　者：杨地委[1,2] 张正勇[1] 

机构地区：[1]中国科学院合肥智能机械研究所,安徽合肥230031 [2]中国科学技术大学自动化系,安徽合肥230027

出　　处：《仪表技术》2011年第3期68-70,共3页Instrumentation Technology

摘　　要：文章提出了一种用于气体检测的MEMS电容式红外发光强度探测器。结合理论推导和仿真分析确定了该探测器的尺寸大小,并对其制作工艺流程做了叙述。它基于气体的红外吸收热效应,借助弹性薄膜的形变将热量变化转变为电容量变化,再经基于运算放大器的电容微传感器检测电路以电压信号输出。将它与环境气室采用MEMS技术一体化,能够得到体积小、精度高和可批量生产的气体检测装置。In this paper,a MEMS capacitive infrared detector is presented.Its size dimension is determined by theoretical derivation and simulation analysis,and the process of machining techniques is illustrated.The basis of this detector is infrared thermal effect.The variation changes from thermal energy to capacitance through deformation of elastic film.The variation of capacitance is inputted to capacitive micro-sensor detecting circuit with operational amplifier,and then voltage is outputted.A gas detecting device,which is of small size,high accuracy and batch production,can be got by integrating this detector with a gas chamber through MEMS technology.

关 键 词：气动腔 平板电容 红外探测器 微电子机械系统 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]