模糊PID控制在纳米微动台系统中的应用  

Application of Adaptive Fuzzy PID Controller to Nano-scale Precision Motion Stage System

作　　者：刘经宇[1] 尹文生[1] 朱煜[1] 

机构地区：[1]清华大学精密仪器与机械学系摩擦学国家重点实验室,北京100084

出　　处：《控制工程》2011年第2期254-257,共4页Control Engineering of China

基　　金：国家973重大基础研究计划资助项目(2009CB724205);国家自然科学基金资助项目(50577037);中国博士后科学基金资助项目(20080440377)

摘　　要：针对在纳米级运动控制中,传统PID算法的参数配置在抑制系统运动超调、提高系统定位精度,以及保障系统稳定性等方面存在矛盾的问题,提出了将模糊自适应PID控制器应用于该系统的方案。并基于大量工程整定实验,给出了针对纳米量级控制特点的模糊集设置和模糊整定规则,选取了合理的PID参数论域取值。实验结果表明,所设计的模糊控制器通过动态调整PID参数的增量,有效改善了微动台系统的动态性能,降低了动态响应的超调,且保证了在一定扰动下系统小于±10 nm的定位精度和鲁棒稳定性。验证了模糊自适应PID控制方法应用于纳米量级运动控制领域的有效性,以及基于实验的模糊规则设计、论域选取方法的可行性。According to the conflicts among overshoot restraint, positioning precision and stability of normal PID controller in nanoscale motion control, the adaptive fuzzy PID controller is applied to the nano-seale pricision motion system. Base on the characters of nano-scale motion control and a group of PID parameters from a mass of practical tuning, a set of fuzzy sets, fuzzy rules and fuzzy domain are proposed. The experiment result shows that the controller is effective to improve the dynamic performance and restrain the overshoot, and the controller has good robust stability and successfully improve the positioning precision to ± 10 nm. And it is proved that the fuzzy PID controller and fuzzy rules building mentioned are effective and feasible.

关 键 词：模糊自适应PID控制 纳米级 微动台 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]