PDMS氧等离子体表面改性工艺参数优化  

Optimization of oxygen plasma treatment parameters for PDMS surface modification

作　　者：叶雄英[1] 施缪佳[1,2] 朱荣[1] 杜敏[1] 冯金扬[1] 

机构地区：[1]清华大学精密仪器与机械学系,精密测试技术及仪器国家重点实验室,北京100084 [2]中国航天员科研训练中心,北京100094

出　　处：《清华大学学报（自然科学版）》2010年第12期1974-1977,1982,共5页Journal of Tsinghua University(Science and Technology)

基　　金：国家“九七三”重点基础研究发展计划项目(2007CB310504);国家自然科学基金项目(50730009)

摘　　要：聚二甲基硅氧烷(PDMS)是目前常用的微流控芯片结构材料,用氧等离子体对PDMS表面进行处理可以改善固化后的PDMS表面浸润性。该文用3因素3水平正交试验研究了改性时间、射频功率、氧气流量对PDMS表面氧等离子体改性效果的影响,并基于有限的实验数据运用基于误差反向传播算法的人工神经网络(BP神经网络)预测了所有27种参数组合的改性效果,找出了最优工艺参数组合。结果表明,射频功率对短时改性效果和改性效果保持性均影响最大。最佳实验结果为:亲水改性后1 h内最小接触角小于2°,1周后最小接触角小于53°。Poly（dimethylsiloxane）（PDMS） is widely used in microfluidic systems.Oxygen plasma treatment was used to modify the surface wettability of PDMS.3 factor-3 level-orthogonal tests were used to design a set of experiments to study the influence of the treatment time,radio frequency（RF） power,and oxygen flow rate in oxygen plasma treatment on PDMS surface wettability.The limited experimental data was used to train a back propagation（BP） neural network to forecast the results of the experiments for the 27 parameter combinations.The experimental results indicate that the RF power is the most important factor for both short-term effects and maintenance of the surface modification.The best experimental results gave a contact angle of less than 2° in an hour and 53° after ageing for one week.

关 键 词：氧等离子体处理 聚二甲基硅氧烷(PDMS) 正交试验 神经网络 

分 类 号：TV148[水利工程—水力学及河流动力学]