六自由度磁浮微动台电磁场建模与计算  

Six degree-of-freedom maglev microstage electromagnetic field modeling and calculation

作　　者：李广[1] 张鸣[1] 朱煜[1] 段广洪[1] Masayoshi Tomizuka 

机构地区：[1]清华大学精密仪器与机械学系,摩擦学国家重点实验室,中国北京100084 [2]加州大学伯克利分校机械工程系,美国伯克利94720

出　　处：《清华大学学报（自然科学版）》2010年第12期1978-1982,共5页Journal of Tsinghua University(Science and Technology)

基　　金：国家“八六三”高技术项目(2009AA04Z148);国家“九七三”重点基础研究发展计划项目(2009CB724205)

摘　　要：为了提高光刻机工件台中微动台的运动精度和加速度,设计了一种将支承和驱动在同一电磁单元中实现的新型Lorentz电机驱动、磁悬浮支承、并联、6自由度微动台结构,应用解析方法建立了微动台磁场模型和特定结构约束下的磁场分布。对微动台电磁力-位移特性进行了分析。采用数值方法计算了微动台电磁单元绕组损耗引起的温升。结果表明:该微动台具有驱动力大、结构简单、散热方便等优点,可为我国自主产权光刻机微动台设计提供参考。The wafer stage precision and acceleration is enhanced by a parallel six degree-of-freedom magnetic levitation（maglev） microstage actuated by a Lorentz motor.The microstage is designed with the bearing and actuating units in the same structure.The microstage electromagnetic field model is used to get an analytic expression for the magnetic field distribution and the electromagnetic force.The numerical method was used to analyze the nonlinear relationship between the electromagnetic force and the position and calculate the microstage temperature rise caused by the winding loss.The results indicate that the microstage has the advantages of large actuating force,compact struture and fast heat dissipation,and can be used for a domestic lithography stage.

关 键 词：微动台 电磁场计算 温升 光刻机 

分 类 号：TH128[机械工程—机械设计及理论]