大气微波等离子体炬装置设计及实验研究  

DESIGN AND EXPERIMENT OF AN ATMOSPHERE MICROWAVE PLASMA TORCH DEVICE

作　　者：刘长林[1] 汪建华[1,2] 熊礼威[1,2] 刘繁[1,2] 

机构地区：[1]武汉工程大学等离子体化学与新材料重点实验室,武汉430073 [2]中国科学院等离子体物理研究所,合肥230031

出　　处：《低温物理学报》2011年第2期112-115,共4页Low Temperature Physical Letters

基　　金：湖北省高等学校优秀中青年科技创新团队计划项目(项目编号2004419)资助课题~~

摘　　要：大气微波等离子体矩具有无电极放电污染、无需昂贵真空设备和易于连续化加工等特点,具有广阔的应用前景.本文设计了一套基于BJ26波导的微波能利用率高、稳定性好的大气微波等离子体装置.该装置由最高输出功率为800W的2.45GHz程控微波源、调配系统、波导谐振腔和耦合天线组成.利用加装游标卡尺的接触式短路活塞,对微波反射面位置进行高精度调节,通过对波导谐振腔和耦合天线的设计,在大气环境下实现了微波等离子体的放电.在不同微波功率、气源以及气体流量条件下进行了等离子体放电实验.结果表明,微波功率为700W、氩气流量为3×103cm3/min时,等离子体放电强度最高、稳定性最强.利用电磁场理论对各种实验结果进行了详尽的分析.Atmosphere microwave plasma torch device can be extensively used for various applications due to its unique characteristics,such as electrode-free discharge contamination,without expensive vacuum equipment and continuous processing easily.A stability and efficient atmosphere microwave plasma torch device based on BJ26 rectangular waveguide was developed,which is supplied by the 800W-2.45GHz programmed microwave power source,a tunning system,a waveguide resonance cavity and a coupling antenna.Atmospheric microwave plasma torch was produced by adjusting impedance matching via contact-type short circuiting plunger with vernier caliper and designing of waveguide resonance cavity and coupling antenna.It is found that the ideal discharge condition is 3×103cm3/min argon flow rate with 700W microwave power under different microwave power,gas species and gas flow rate.Finally,the discharge result was also analyzed in detail using electromagnetic field theory.

关 键 词：大气压力 等离子体炬 等离子体波导 放电 

分 类 号：O539[理学—等离子体物理]