铝层厚度对铝诱导非晶硅薄膜晶化过程的影响  

Effect of Aluminum Layer Thickness on Crystallization Process of Aluminum Induced Amorphous Silicon Films

作　　者：梁戈[1] 郭烈萍[1] 李洪涛[1] 蒋百灵[1] 焦栋茂[1] 

机构地区：[1]西安理工大学材料科学与工程学院,西安710048

出　　处：《人工晶体学报》2011年第1期114-118,共5页Journal of Synthetic Crystals

基　　金：陕西省教育厅科学技术研究计划(09JK623)资助项目

摘　　要：基于铝诱导非晶硅薄膜固相晶化方法,利用直流磁控溅射离子镀技术制备了A l/S i/…A l/S i/glass周期性结构的薄膜。采用真空退火炉对A l/S i多层薄膜进行了500℃退火实验,通过透射电子显微镜(TEM)分析了退火前、后A l/S i多层薄膜截面形貌的变化规律,并结合扩散过程探讨了铝层厚度对铝诱导非晶硅薄膜晶化过程的本质影响机理。研究结果表明:在铝诱导非晶硅薄膜固相晶化过程中,随退火过程的进行,A l、S i原子会沿A l/S i层间界面进行互扩散运动且在S i层中达到临界浓度Cs的A l原子所在区域整体呈线形平行于A l/S i界面逐渐向铝原子扩散距离增大的方向推进;随着A l层厚度的增加,A l在S i层中达到临界浓度Cs的区域整体向前推进速度加快,已扩散区域产生硅初始晶核的数量也随之增大;随A l/S i层厚比的增大,虽因铝诱导而晶化的硅薄膜均为多晶态,但非晶硅薄膜在晶化过程中的生长晶面数量增多,同时硅晶粒的尺寸有所减小。Based on aluminum-induced solid-phase crystallization of amorphous silicon thin film method,the period structure of Al/Si…Al/Si/glass films were prepared by DC magnetron sputter ion plating technique.The Al/Si multilayer films were annealed at 500 ℃ in vacuum annealing furnace and cross-section phtotopography of the films before and after annealing were analyzed by TEM,and the essential influence of aluminum layer thickness on crystallization process of aluminum induced amorphous silicon films was discussed combine with diffusion process.The results show that： Al,Si atoms take inter-diffusion movement along the Al/Si interface layer and the global zone reached the critical concentration Cs in Si layer likes a line parallel to the Al/Si interface and gradually increases to the aluminum atoms in the direction of promoting the diffusion distance during the AIC process by annealing.The critical concentration of Cs in the region as a whole moved forward faster and the number of initial silicon nucleation is larger with increasing the thickness of Al layer.Although the results of aluminum-induced crystallization of silicon films are all polycrystalline,the number of growing crystal planes is increased and the size of silicon grains is reduced simultaneity.

关 键 词：铝层厚度 非晶硅薄膜 晶化过程 扩散 

分 类 号：TB43[一般工业技术]