基于SU-8厚胶光刻工艺的微电铸铸层尺寸精度控制新方法  

New Method for Dimensional Precision Control of Electroformed Parts by Using Micro Electroforming Technique with SU-8 Thick Photoresist

作　　者：刘冲[1,2] 李苗苗[1] 施维枝[1] 杜立群[1,2] 王立鼎[1,2] 

机构地区：[1]大连理工大学辽宁省微纳米技术及系统重点实验室,大连116024 [2]大连理工大学精密与特种加工教育部重点实验室,大连116024

出　　处：《机械工程学报》2011年第3期179-185,共7页Journal of Mechanical Engineering

基　　金：国家科技支撑研究发展计划(863计划;2006BAF04B13);国家重点基础研究发展计划(973计划;2007CB714502);国家自然科学基金(20890024;50575036)资助项目

摘　　要：以SU-8胶为微电铸母模制作镍模具时,胶模的热溶胀性使胶模变形,导致铸层线宽缩小,这是影响微电铸铸层尺寸精度的主要因素。针对密集蛇形沟道图形的镍模具微电铸工艺,以200.0μm厚SU-8胶为胶模,研究微电铸铸层尺寸精度的控制方法,提出基于SU-8厚胶光刻工艺的微电铸铸层尺寸精度控制新方法,即在图形四周增设一条封闭等间距的隔离带,用隔离带减少影响图形区域的SU-8胶模的体积,阻止电铸时该处胶模的热溶胀对图形区域的影响,进而减小铸层尺寸变化。结果表明,采用增设隔离带方法制作的镍模具,胶模线宽变化量最大值由61μm减小到31.4μm,铸层尺寸相对误差的最大值由31.3%减小到16.7%,这种方法显著提高微电铸铸层的尺寸精度。Swelling of SU-8 photoresist leads to deformation of photoresist and width reduction of electroformed parts when nickel mould is fabricated with this photoresist as master die of micro electroforming,which is the main influence factor of electroformed parts dimensional precision.The micro electroforming of nickel mould with multiple serpentine channels is fabricated by using SU-8 photoresist with 200 μm thickness as master die.A closed and equally distance isolation belt is designed around the graphic zone in the mask to improve the dimensional precision of electroformed parts.The isolation belt is used to reduce the SU-8 photoresist volume around the graphic zone,prevent thermal swelling of the photoresist outside the isolation belt from affecting the graphic zone and decrease dimensional change of electroformed parts.Experimental results show that the maximum dimensional error of master die added with isolation belt reduces from 61 μm to 31.4 μm,and the maximum dimensional relative error of electroformed parts reduces from 31.3% to 16.7%.This method obviously improves the dimensional precision of electroformed parts.

关 键 词：微电铸 SU-8胶 热溶胀性 隔离带 尺寸精度 

分 类 号：TN405[电子电信—微电子学与固体电子学]