六自由度微动台热特性分析与散热设计  

Six-DOF Microstage Thermal Analysis and Cooler Design

作　　者：李广[1] 张鸣[1] 朱煜[1] 段广洪[1] Masayoshi Tomizuka 李广 Masayoshi Tomizuka[2] 

机构地区：[1]清华大学精密仪器与机械学系摩擦学国家重点实验室,北京100084 [2]加州大学伯克利分校加利福尼亚州,美国CA94720

出　　处：《组合机床与自动化加工技术》2011年第3期1-3,7,共4页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：国家重点基础研究发展计划(973计划:2009CB724205);国家高技术研究发展计划(863计划:2009AA04Z148)

摘　　要：温升是引起微动台精度和环境变化的重要因素,从热特性分析着手进行微动台优化设计是提高微动台性能的一条重要途径。论文提出了一种新型纳米精度六自由度微动台结构,给出了微动台的发热热源、定子线圈等效导热系数和自然对流及强制水冷条件下表面散热系数,建立了微动台三维温度场的数学模型。根据热传导理论,完成了微动台定子线圈稳态温度场的理论计算,并采用数值方法计算了微动台在自然对流和强制水冷条件下的三维温度场分布。根据计算和分析结果,完成了微动台冷却系统的设计。结果表明,采用强制水冷后,微动台动子温升不超过1℃,满足微动台工程设计要求。The rising temperature is a significant factor to influence the microstage precision and environment.There is an important way to improve the microstage performance,which is derived from thermal analysis to achieve the microstage optimization design.This paper presents a new type of 6-degree-of-freedom nanometer precision microstage structure.The microstage heat source was given,and the effective thermal conductivity of the stator coil,the water and natural conditions convection heat coefficient of the surface was calculated.Furthermore,the microstage mathematical model of three-dimensional temperature field was established.According to the heat transfer theory,the microstage stator coil temperature field theory calculation was completed.Calculated by the numerical method,the microstage three-dimensional temperature distribution in the natural convection and water cooling conditions was obtained.According to the calculation and analysis,a novel powerful cooler is designed.The results show that after the water-cooled,the microstage mover temperature rises less than 1℃.The precision request was satisfied.

关 键 词：微动台 热分析 散热设计 光刻机 

分 类 号：TH703.8[机械工程—仪器科学与技术]