聚酯振膜镀膜用磁控溅射设备  

Magnetron sputtering system for depositing films on the polyethylene terephthalate resonant diaphragm

作　　者：安其[1] 

机构地区：[1]北京北仪创新真空技术有限公司,北京102600

出　　处：《真空》2011年第2期6-9,共4页Vacuum

摘　　要：本文介绍了一种在PET材料上镀制Ni膜的磁控溅射镀膜设备的结构及特点,解决了PET材料无法在高温环境中镀膜的问题。具有操作方便、成本低、生产效率高、膜层质量好及膜层制备可重复性好等特点。在实际生产中取得了良好的效果,有广阔的应用前景。Describes the structure and characteristics of a kind of magnetron sputtering system used for depositing the nickel film on the PET（polyethylene terephthalate） materials which can solve such a problem that films can＇t be deposited on the PET materials at high temperatures.The developed system has good effects and application prospect in actual production with characteristics such as convenient operation,low cost,high production efficiency,good coating quality and high reproducibility,etc.

关 键 词：PET 镍膜 磁控溅射 

分 类 号：TB43[一般工业技术]