单向平动微位移工作台的静刚度分析  

Analysis of static stiffness for a single direction translation micro-displacement stage

作　　者：朱仁胜[1,2] 沈健[1] 刘永梅[3] 

机构地区：[1]合肥工业大学机械与汽车工程学院,安徽合肥230009 [2]清华大学电力系统与发电设备控制及仿真国家重点实验室,北京100084 [3]安徽电力濉溪供电有限责任公司,安徽淮北235100

出　　处：《合肥工业大学学报（自然科学版）》2011年第4期485-488,518,共5页Journal of Hefei University of Technology：Natural Science

基　　金：国家科技部创新基金资助项目(07C26213401449)

摘　　要：文章根据梁单元有限元法,把柔性铰链视为变截面梁单元,建立了柔性铰链的单元刚度矩阵;在此基础上,建立了单向平动微位移工作台的有限元计算模型,得到了微位移工作台的位移输出特性;同时,选取不同的柔性铰链参数,用有限元分析软件对微位移工作台进行分析计算并与理论计算进行比较,结果表明2种方法计算的结果相吻合,验证了理论模型的正确性。By applying the beam element of finite element method,an element stiffness matrix of flexure hinge which is considered as non-uniform beam is established in this paper.Based on the stiffness matrix,the finite element model of a single direction translation micro-displacement stage is presented.The characteristic of the displacement output of the micro-displacement stage is gained by the model.Meanwhile,by selecting different parameters of the flexure hinge,a comparison is made between the theoretical model and the simulation model using finite element analysis software.The results of two methods to calculate the output displacement are in good agreement,which indicates that the theoretical model is correct.

关 键 词：柔性铰链 刚度矩阵 微位移工作台 有限元法 

分 类 号：O302[理学—力学]