静电驱动的亚微米悬臂梁谐振器非线性特性  

Nonlinear characteristics of sub-micron cantilever beam resonators actuated by statical electricity

作　　者：岳东旭[1] 于虹[1] 袁卫民[1] 

机构地区：[1]东南大学电子科学与工程学院MEMS教育部重点实验室,江苏南京210096

出　　处：《光学精密工程》2011年第4期783-788,共6页Optics and Precision Engineering

基　　金：国家973重点基础研究发展计划资助项目(No.2006CB300404); 国家863高技术研究发展计划资助项目(No.2007AA04Z301)

摘　　要：理论分析了亚微米尺寸的悬臂梁结构的非线性力学模型,研究了非线性产生的物理机制。采用外部静电激励机制,使悬臂梁谐振器产生谐振,借助Polytec激光多普勒测振系统检测了悬臂梁的频率响应曲线。测试结果表明,悬臂梁具有显著的非线性效应(即"弹簧变软"效应)。实验证实了这种非线性效应几乎和交流电压无关,却随着直流电压的增大而显著增大,最大峰值偏移达到0.5MHz。提取出3组一阶机械弹性系数分别为79.62,31.75和14.92N/m,实验结果符合理论规律。对实验中的偏差做了进一步的分析和讨论,利用软件ANSYS对过腐蚀对结构刚度和频率响应的影响做了相应的模拟,结果和实验测量数据相吻合。A nonlinear mechanical model for sub-micron cantilevers was analyzed in detail and its physical mechanism was researched to provide a theoretical basis for experiments.The electrostatical force was used to achieve the resonance state cantilever beams and a Polytec laser Doppler vibration measurement system was taken to observe the frequency response curve.Experimental results show that the beams have significant nonlinear effects（the spring softening effect） and the nonlinearity is relatively independent on the AC voltage,but it is markedly enhanced with increasing the DC voltage.The obtained maximum peak shift is 0.5 MHz and extracted first-order mechanical elasticity coefficients are 79.62,31.75,and 14.92 N/m,respectively.Furthermore,the deviation of the experiment was also disccussed and analyzed.The effects of overetching by wet chemical etching on the stiffness and frequency response were stimulated by ANSYS software.In conclusion,the corresponding simulation results are well coincident with the experimental data.

关 键 词：静电驱动 悬臂梁谐振器 非线性 频率响应 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]