真空计的发展概况与趋势  

REVIEW AND TREND ON THE DEVELOPMENT OF VACUUM GAUGE

作　　者：梁平[1] 李杰[1] 戴佳鑫[1] 干蜀毅[1] 

机构地区：[1]合肥工业大学机械与汽车工程学院真空技术与装备系,安徽合肥230009

出　　处：《真空与低温》2011年第1期53-57,62,共6页Vacuum and Cryogenics

摘　　要：真空计量器具被广泛应用于各科学实验领域,种类繁多,样式各异。真空计的微型化是其主要发展趋势。概述了真空计的发展历程,重点对近年来真空计的最新发展作了梳理,并提出了某些特殊环境下真空度测量方法的构想。The vacuum gauge has various styles,and is widely used in many scientific field as well as industries.A notable trendency for the development of modern gauges is their miniaturization.In this paper,the history,especially its recent development of vacuum gauge is reviewed,and some vacuum measurement under special circumstances is discussed.

关 键 词：真空计 真空测量 微机电系统 电容薄膜真空计 

分 类 号：TB772[一般工业技术—真空技术]