基于LIGA技术的光热驱动微开关研究  

Study on opto-thermal drive micro-switch fabricated based on LIGA technology

作　　者：林星[1] 赵冬伟[1] 王波[2] 伊福廷[2] 张冬仙[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,浙江杭州310027 [2]中国科学院高能物理研究所,北京100049

出　　处：《光学仪器》2011年第2期33-37,共5页Optical Instruments

基　　金：国家863计划资助课题(2006AA04AZ237)

摘　　要：设计制作了一种三角形结构的金属材料光热驱动微开关。通过理论分析和ANSYS仿真,揭示了光热偏转量与三角形结构的微悬臂倾角之间的相互关系;基于同步辐射光源及LIGA技术,以金属镍(Ni)为基底材料,微加工制作出一个微悬臂长度1435μm、倾角6°的微开关器件;利用光热驱动控制与显微视频监控系统,进行了光热驱动及偏转量检测实验。实验结果表明,在波长808nm、功率135mW的半导体激光控制下,可产生约20μm的最大光热偏转量,从而验证了这一金属材料光热驱动微开关的可行性;同时,为设计制作基于金属材料的其他微型光热驱动器件及实际应用提供了技术基础。A triangle-shaped metallic opto-thermal（OT）drive micro-switch is designed. By the aid of theoretical analysis and ANSYS simulation, the relationship between OT deflection and tilt angle of the micro-switch cantilever is disclosed. Based on LIGA technology, an OT microswitch is fabricated using metal nickel, with one 1435μm-length cantilever and 6° tilt angle. Experiments are carried out on the mirco-switch using a self made OT controlling and microscopic monitoring system. The results show that, under the control of an 808nm, 135mW laser, the maximum OT deflection can reach 20μm, thus proving the feasibility of the metallic OT micro-switch. At the same time, this research also provides technical fundament for designing and fabricating other metallic micro-actuators in practical applications.

关 键 词：LIGA 光热驱动 微开关 ANSYS仿真 光热偏转量 

分 类 号：TH703[机械工程—仪器科学与技术]