非平衡磁控溅射类金刚石薄膜的抗刻划性能及氟对结合强度的影响  

SCRATCH TEST OF DLC AND FLUORINATED DLC DEPOSITED BY UNBALANCED MAGNETRON SPUTTERING METHOD AND THE INFLUENCE OF FLUORINE ON THE PROPERTIES OF DLC

作　　者：赵建生[1] 许大庆[1] ChoyKwangLeong 

机构地区：[1]华中理工大学材料科学与工程系,武汉430074 [2]ImperialCollegeofScience,TechnologyandMedicine

出　　处：《机械工程学报》1999年第5期80-84,共5页Journal of Mechanical Engineering

基　　金：国家模具重点实验室资助

摘　　要：使用非平衡磁控溅射方法沉积了类金刚石（ＤＬＣ）和一定含氟浓度的氟化ＤＬＣ。使用划痕方法试验了不同ＤＬＣ薄膜的抗刻划性能并对其试验机理进行了研究。结果表明划痕试验过程中随着试验载荷的增加，ＤＬＣ破坏形式可分为开裂、崩片、划入剥落及表层的脱落等阶段。其中抗开裂、崩片及划入性能取决于ＤＬＣ本身的力学特性。膜层的脱落载荷取决于膜层与基体的结合强度。降低薄膜的摩擦系数有利于提高ＤＬＣ薄膜的刻划抗力。氟元素的加入可以降低ＤＬＣ层的刻划摩擦力，提高其开裂强度并增加ＤＬＣ薄膜与基体材料的结合强度。Pure DLC(Diamond like carbon a C∶H) and fluorinated DLC(a C∶H∶F)are deposited using unbalanced magnetron sputtering method.Mechanical properties of the different DLC are tested using ST2200 scratch test equipment and the mechanism of the scratch test is studied.The results show that the damage forms of the DLC surface during the test processing are cracking ,chips,indenter scratch in the surface and the total sapling of the surface layer by the increasing of the test load.Cracking resistance,anti chipping and scratch in properties depend on the mechanical characteristic of the DLC layer while the sapling resistance of the surface layer is related to the adhesion property between the surface layer and substrate.Derreasement of the friction coefficient of the DLC is beneficial for increasing the anti scratch ability of the DLC layer.Comparing with DLC,fluorinated DLC has lower friction in the same scratch load,higher anti cracking strength and higher adhesion strength.

关 键 词：类金刚石 薄膜 氟化类金刚石 磁控溅射 结合强度 

分 类 号：O484[理学—固体物理]