数字光学轮廓仪中相位去包裹算法研究  

Two dimensional Phase Unwrapping Algorithms

作　　者：曹原[1] 韦春龙[1] 程维明[1] 陈明仪[1] 

机构地区：[1]上海大学精密机械工程系,上海嘉定201800

出　　处：《光学精密工程》1999年第5期100-105,共6页Optics and Precision Engineering

基　　金：上海市科委青年基金;青年科技启明星计划项目

摘　　要：相位扫描干涉度量术的广泛应用推动了去包裹算法的发展。在多种算法中，用于数字光学轮廓仪的相位去包裹算法必须具有较高的普遍适用性，而且必须兼顾健壮性与效率。本文对传统算法和最小二乘算法这两种典型去包裹算法进行了比较研究，并在自行研制的数字光学轮廓仪上进行了验证。The wide use of phase stepping interferometry has greatly facilitated the development of phase unwrapping technique. When used in digital optical profiler, the phase unwrapping algorithm must be more general and robust, and has high efficiency. The two typical algorithms: the traditional algorithm and the least squares algorithm have been discussed and examined by testing of an optical disk with the digital optical profiler we have developed. The experimental result shows that the least squares algorithm is reliable and ideal.

关 键 词：数字光学轮廓仪 相位去包裹 最小二乘算法 

分 类 号：TH741.3[机械工程—光学工程]