纳秒激光刻蚀复合材料基金属薄膜机制研究  

Mechanism of Nano-Second Laser Ablation of Metallic Thin Film on Composite Material

作　　者：杨建平[1] 陈学康[1] 吴敢[1] 王瑞[1] 

机构地区：[1]兰州物理研究所表面工程技术重点实验室,甘肃兰州730000

出　　处：《中国激光》2011年第6期256-260,共5页Chinese Journal of Lasers

摘　　要：通过分析激光脉冲作用于金属薄膜后的能量吸收及演化过程,提出了金属薄膜/复合材料组合体系在纳秒级脉冲激光作用下,因复合材料易气化的特性而存在的特有的薄膜/基底界面分离现象。提出利用这一特有的界面分离过程,可通过控制激光能量密度实现对这种结构体系的高精度、无损伤的刻蚀。利用波前衍射变换技术整形过的刻蚀激光进行了验证实验,实验结果证实了这一方法的可行性。The processings of laser energy absorption and thermal conduct are analyzed,and a mechanism of metallic film/composite substrate interface separation while metallic film in solid state due to the composite material thermal decomposition is also proposed subsequently.A new method of improving laser ablation accuracy using this mechanism and laser power distribution transform technology is proposed.Laser wavefront diffraction transform technology is employed to convert the ablation laser power density and its distribution,and the confirmed experiment is carried out.

关 键 词：激光技术 激光刻蚀 金属薄膜 复合材料基底 物理机制 

分 类 号：O437[机械工程—光学工程]