一种基于SOI的集成光波导耦合系统的设计与制备  

Design and Fabrication of Integrated Optical Waveguide Coupling System Based on SOI

作　　者：李鹏[1] 张宇光[1] 王丽[1] 刘正[1] 严英占[1] 仝晓刚[1] 薛晨阳[1] 闫树斌[1] 

机构地区：[1]中北大学电子测试技术重点实验室仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《传感技术学报》2011年第6期839-842,共4页Chinese Journal of Sensors and Actuators

基　　金：国家973计划前期研究专项(2009CB326200);国家自然科学基金项目(50975266;60707014;60778029);重点实验室基金项目(9140c1204040909);总装创新项目(7130907);山西省自然科学基金项目(2010011003);山西省研究生优秀创新项目(20103083);山西省重点实验室开放项目(200911059-16)

摘　　要：根据锥形光纤与平面环型微腔耦合原理,使用L-Edit版图设计软件设计并优化了锥形光波导与微腔耦合系统。利用MEMS工艺对SOI圆晶片进行加工,从而实现了锥形光波导与跑道型以及环型光波导微腔的集成。其中,光波导以及微腔通过ICP刻蚀顶层硅而成,矩形槽通过RIE刻蚀衬底硅而成。光波导两侧的矩形凹槽可方便光纤接入以及对出射光的探测,从而提高了光波导微腔耦合系统的稳定性。Taper optical waveguide and microcavity coupling system based on the taper-fiber and planar microring cavity coupling theory was designed and optimized by L-Edit layout software.And integrated taper-waveguide and the runway and ring-type optical waveguide microcavity coupling systems were processed by MEMS technology on SOI wafer.Among them,the waveguide and the microcavity were formed by ICP etching the device layer silicon and rectangular grooves were formed by RIE etching the silicon substrate.Rectangular grooves on both sides of the waveguide provided an easy access for fiber and to detection of emitting light,thereby enhanced the stability of the optical waveguide microcavity coupling system.

关 键 词：锥形光波导 耦合 ICP RIE 跑道型微腔 环型微腔 

分 类 号：TN3[电子电信—物理电子学]