高Q值环形波导微谐振腔研究进展  

Research Advance of Waveguide Micro-ring Resonators with High Q Value

作　　者：晋玉剑[1] 薛晨阳[1] 丑修建[1] 刘俊[1] 张文栋[1] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,电子测试技术重点实验室,太原030051

出　　处：《材料导报》2011年第13期65-69,共5页Materials Reports

基　　金：国家自然科学基金(61076111;60778029);国家973前期预研项目(2009CB326206);山西省研究生优秀创新项目(20103083)

摘　　要：基于高Q值环形波导微谐振腔和微加工工艺的微光机电器件及系统是当前微纳制造科学和量子光学技术领域的研究热点。主要分析了环形波导微谐振腔的物理作用及应用价值,系统综述了环形波导微谐振腔Q值的测量方法,重点讨论了硅基环形波导微谐振腔Q值的影响因素,从材料、结构设计、加工工艺方面分析了提高环形波导微谐振腔Q值的技术途径,指出了当前高Q值环形波导微谐振腔研究存在的技术瓶颈问题,并展望了未来的发展趋势。Micro optical electronic mechanical devices and systems based on high-Q value micro ring resonators and micro-processing technology have been the hot research of micro and nano fabrication and quantum optics technology realm. The physical effects and application value of micro ring resonators are generalized. Q value measurement methods and influencing factors of micro ring resonators based on Si material are systematically summarized. The ways of improving Q value are analyzed from materials, structural design, processing technology perspective. The technical bottlenecks which restrict the research of micro ring resonators and the prospect of its development are proposed.

关 键 词：光波导 微谐振腔 高Q值 微光机电系统 

分 类 号：TN42[电子电信—微电子学与固体电子学]