三轴硅微静电加速度计的实验研究  

Experiment study of a tri-axis electrostatically suspended micromachined accelerometer

作　　者：王嫘[1] 韩丰田[1] 董景新[1] 刘云峰[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《中国惯性技术学报》2011年第3期359-363,共5页Journal of Chinese Inertial Technology

基　　金：自然科学基金(40174049);航空科学基金(20100858005)

摘　　要：静电加速度计依靠可控静电力将敏感质量无接触地悬浮在电极腔内,在空间微重力环境下通过降低带宽和量程可以实现极高的分辨率。设计了一种采用玻璃-硅-玻璃"三明治"结构、环形敏感质量、体硅加工工艺的三轴硅微静电加速度计,对加速度计的力/力矩平衡回路进行了分析。采用基于DSP的数字控制器,实现了环形敏感质量的五自由度稳定悬浮,在大气环境下测试了静电加速度计的性能。电测法测试结果表明静电加速度计的轴向量程4.22 g,噪声谱密度0.19 mg/Hz1/2;径向量程4.63 g,噪声谱密度0.44 mg/Hz1/2。Electrostatically suspended accelerometers could achieve extremely high resolution in micro-gravity measurement with significantly reduced operating bandwidth and range.A tri-axis electrostatically suspended accelerometer is designed with a ring-shaped proof mass,and is realized in a glass-silicon-glass sandwich structure by bulk silicon micromachining.The force balance loop by electrostatic suspension is analyzed,and a DSP-based control scheme is realized to achieve stable levitation of the ring in five degrees of freedom.The experiment results from this triaxis micro-accelerometer show that the dynamic ranges and noise floors are 4.22 g and 0.19 mg/Hz^1/2 in the axial axis,4.63 g and 0.44 mg/Hz1/2 in two radial axes respectively.

关 键 词：硅微加速度计 静电悬浮 体硅工艺 三轴加速等计 

分 类 号：U666.1[交通运输工程—船舶及航道工程]