Si微波功率晶体管加速寿命试验夹具的设计  

Clamp Design for Accelerated Life Test of Silicon Pulse Power Transistor

作　　者：童亮[1] 彭浩[1] 高金环[1] 黄杰[1] 

机构地区：[1]国家半导体器件质量监督检验中心,石家庄050051

出　　处：《半导体技术》2011年第8期639-642,650,共5页Semiconductor Technology

摘　　要：温度应力的加速寿命试验结果与所用夹具的耐温性及壳温的精确测量与控制直接相关。通过大量研究,发现一体式夹具在试验壳温提高到某一值时性能迅速劣化,因此设计符合高温下使用的分离式夹具是加速寿命试验顺利进行的必要条件。提供了两种加速寿命试验夹具的设计思路,并用于Si微波功率管加速寿命试验,通过步进应力试验和恒定应力试验,获取了该Si微波功率管加速寿命。分体夹具可耐受的试验温度在260℃以上,为加速寿命试验提供了温度应力的提升空间。The results of accelerated life test under temperature stress is directly connected with the measure exactness and the control of case temperature,and the capability of the test clamp to bear high temperature.Research show that the performance of the integrative clamp declined quickly after the test case temperature improved to a certain value.So it is a necessary condition to design the separated clamp which fits the high temperature requirement for accelerated life test going with a swing.Two kinds of clamp design solutions for accelerated life test were offered,and adopted in the accelerated life test of silicon microwave power transistor.The accelerated life time was gained through the step-stress test and the constant-stress test.The separate clamp can stand the temperature over 260 ℃,so the test temperature can be increased to an adequate degree.

关 键 词：加速寿命试验 可靠性 试验夹具 Si微波功率管 步进应力试验 

分 类 号：TN306[电子电信—物理电子学]