RF-MEMS谐振器和滤波器研究进展  

Development of the RF-MEMS resonators and filters

作　　者：潘武[1] 宋茂叶[1] 吴文雯[1] 张雪莲[1] 

机构地区：[1]重庆邮电大学光电工程学院,重庆400065

出　　处：《电子元件与材料》2011年第9期76-81,共6页Electronic Components And Materials

基　　金：重庆市自然科学基金资助项目(No.CSTC2010BB2414)

摘　　要：介绍了基于梳状、梁式、圆盘三种结构的射频微机电系统(RF-MEMS)谐振器及滤波器,并对RF-MEMS谐振器及滤波器的结构与性能参数进行讨论;分析RF-MEMS谐振器及滤波器设计和制造中的有关问题及其处理方法;RF-MEMS谐振器及滤波器性能优异,能与其他器件实现片上集成,且与集成电路工艺兼容,在射频无线通信系统中的应用有着良好前景。RF-MEMS resonators and filters which based on the comb, beam and disk structures are introduced. The parameters of structure and performance of several RF-MEMS resonators and filters are discussed. The related problems and its handling techniques of RF-MEMS resonators and filters in the design and manufacture process are analyzed. RF-MEMS resonators and filters have excellent performance, can be integrated with other circuit components on a chip, and be compatible with integrated circuit process, would be used in the radio frequency communication systems.

关 键 词：射频微机电系统 微机械谐振器 综述 微机械滤波器 

分 类 号：TN92[电子电信—通信与信息系统] TP211.4[电子电信—信息与通信工程]