基于热学理论的微型真空检测器件的研究  

Research on Micro Vacuum Measurement Device Based on Heat Transfer Principle

作　　者：刘川[1] 汪学方[2] 罗小兵[1,2] 

机构地区：[1]华中科技大学能源与动力工程学院,湖北武汉430074 [2]华中科技大学武汉光电国家实验室MOEMS研究部,湖北武汉430074

出　　处：《工程热物理学报》2011年第9期1553-1556,共4页Journal of Engineering Thermophysics

基　　金：国家高技术研究发展计划(863计划)(No.2008 AA04Z307)

摘　　要：介绍了一种基于热学知识设计的表面薄膜微型MEMS皮拉尼计，并将其用于圆片级真空封装腔体的真空度测量中。为了设计灵敏度较高的皮拉尼计，对不同结构的皮拉尼计的热量分布进行了数值计算与分析，并最终完成了加工。此皮拉尼计的结构和加工工艺比较简单，能用于一般的MEMS真空封装中。实验结果显示该皮拉尼计可以测量1-10^5Pa的真空度，并在1-1000Pa内有很好的线性度。A surface micro MEMS Pirani gauge based on heat transfer principle was introduced, which can be used for measuring vacuum pressure inside vacuum packaging in wafer level. In order to design a high sensitivity Pirani gauge, numerical evaluation and analysis were carried out with different structures, and the fabrication according to the analysis was conducted. Because of simplified processes and structure, this Pirani gauge can be used in general vacuum packaging. The experimental results show that the Pirani gauge is capable of measuring pressures from atmospheric value to 1 Pa and has a good linearity in the range from 1 Pa to 1000 Pa.

关 键 词：MEMS 皮拉尼计 圆片级真空封装 真空度测试 

分 类 号：TK123[动力工程及工程热物理—工程热物理]