一种电容式闭环微加速度计系统研究  

Study on Closed-Loop System of a Capacitive Micro-Accelerometer

作　　者：陈伟平[1] 陈晓亮[1] 郭玉刚[1] 刘晓为[1] 

机构地区：[1]哈尔滨工业大学MEMS中心,黑龙江哈尔滨150001

出　　处：《中北大学学报（自然科学版）》2011年第4期502-506,共5页Journal of North University of China(Natural Science Edition)

基　　金：国家863计划资助项目(2008AA042201)

摘　　要：基于SOG(Silicon on Glass)工艺设计了一种新型电容式加速度传感器结构,分析了该结构的检测和反馈原理.为了提高闭环微加速度传感器的性能,更好地实现闭环控制调节作用,对传感器系统进行了研究.在反馈系统中引入PID控制器,并建立了SIMLINK系统模型,分析了系统闭环传递函数以及控制参数对传感器系统的影响.仿真结果表明:PID控制器可以很好地改善系统的频率响应,增加系统带宽,调节系统的阻尼,减小系统的响应时间和调节时间,大大提高了闭环加速度计的性能.A closed-loop accelerometer based upon SOG（Silicon on Glass） technology,and its capacitive sensing element were described.Sensing and feedback principle were analyzed.In order to improve the performance of the micro-accelerometer and obtain a good control of the system,a SIMULINK model was established and the closed-loop transfer function was analyzed.In feedback system,a PID controller was used.The effects of the controller parameters were simulated,and the simulated results show that the PID controller can improve the frequency response,broad the bandwidth,optimize the damping,and decrease the response time and rise time.

关 键 词：MEMS 加速度计 闭环系统 PID控制器 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置]