静电梳齿驱动结构的稳定性分析  

Analysis of Lateral Stability of Electrostatic Comb-drive Structure

作　　者：张峰[1] 苑伟政[1] 常洪龙[1] 丁继亮[1] 谢建兵[1] 

机构地区：[1]西北工业大学陕西省微/纳米系统重点实验室,西安710072

出　　处：《传感技术学报》2011年第8期1122-1125,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(60976087);国家高技术研究发展计划项目(2009AA04Z320)

摘　　要：静电梳齿驱动结构的最大驱动位移主要受限于其侧向不稳定性,即当驱动电压接近吸合电压时,静电梳齿驱动结构的活动梳齿与固定梳齿发生吸合,导致静电梳齿驱动器失效。建立典型静电梳齿驱动结构的稳定性分析模型,研究梳齿驱动结构稳定性的影响因素,并进行理论分析、仿真分析和实验验证。结果表明:支撑梁结构的纵/横刚度比是影响静电梳齿驱动结构稳定性的关键因素,其比值越大,静电梳齿驱动结构的稳定性越好。Electrostatic comb-drive actuators have been widely used in MEMS field.In general,the traveling ranges of comb-drive actuators are limited by the lateral instabilities which cause a sudden snap between the movable comb fingers and the fixed fingers,resulting in functional failure.The lateral stability of the typical electrostatic comb structure was investigated.From theoretical simulations and experimental verifications,it was found that the ratio of lengthwise stiffness to transverse stiffness of the suspensions is a key factor for lateral stability.With increased stiffness ratio,the lateral stability of comb-drive structure is improved.

关 键 词：静电梳齿驱动结构 稳定性 侧向吸合 刚度 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]