第三组元铝元素对TaMo高温合金涂层组织和性能的影响  

Influence of the third element Al on structure and properties of TaMo high-temperature alloy coating

作　　者：季鑫[1] 宓一鸣[1] 张朝民[1] 周细应[2] 赵新新[1] 周有余[1] 

机构地区：[1]上海工程技术大学基础教学学院,上海201620 [2]上海工程技术大学材料工程学院,上海201620

出　　处：《金属热处理》2011年第9期30-33,共4页Heat Treatment of Metals

基　　金：上海市优秀高校青年教师项目(gjd110033);上海市教委学科建设项目(A-3500-11-10);上海市教委创新项目(10YZ172)

摘　　要：通过磁控溅射法在硅基材上制备了不同基底温度的TaMo和TaMoAl涂层,用原子力显微镜(AFM)和X射线衍射仪(XRD)研究了加入第三组元Al元素的情况下,TaMo涂层的表面形貌和组织结构,用显微硬度计和划痕试验仪测试了涂层的显微硬度和膜基结合力等力学性能。结果表明,两种基底温度工艺下铝元素的加入对TaMo涂层的组织结构和表面形貌均有显著影响。另外,在350℃的基底加热工艺下铝元素的加入提高了TaMo涂层的显微硬度和膜基结合力。The TaMo and TaMoAl coatings at different substrate temperatures were fabricated on silicon substrate by magnetron sputtering method.The surface morphology and structure of TaMo coatings with adding the third element Al were investigated by means of AFM and XRD.The mechanical properties of TaMo coatings such as micro-hardness and adhesive force were investigated by means of microhardness measurement and scratch spectrometer instrument.The results show that the two substrate heating process have significant effect on microstructure of TaMo coatings with adding the third element Al.Furthermore,the microhardness and adhesive force are increased with adding the third element Al at 350 ℃.

关 键 词：磁控溅射法 TaMo涂层 基底温度 结合力 表面形貌 

分 类 号：TG156.99[金属学及工艺—热处理]