压电厚膜驱动的高刚度微变形镜的制备  

Fabrication of High Rigidity Micro Deformable Mirror Based on PZT Thick-Film Actuator

作　　者：马剑强[1] 李保庆[1] 许晓慧[2] 褚家如[1] 

机构地区：[1]中国科学技术大学精密机械与精密仪器系,合肥230027 [2]江苏省电力试验研究院有限公司,南京210036

出　　处：《纳米技术与精密工程》2011年第5期427-431,共5页Nanotechnology and Precision Engineering

基　　金：安徽省自然科学基金资助项目(090412027);中国科学技术大学青年科学基金资助项目(2090090002)

摘　　要：研究制备了一种压电厚膜微变形镜,微变形镜的连续薄膜式单晶硅镜面由61单元压电厚膜致动器阵列驱动.以镜面冲程与工作频带宽为目标,对微变形镜的结构参数进行优化设计,根据优化参数采用硅微加工技术试制了61单元致动器的微变形镜.镜面、压电陶瓷与弹性支撑层厚度分别为100μm、60μm与60μm,单元间距为5mm,通光口径为40 mm.对制备的样品性能进行了测试,微变形镜在100 V电压驱动下变形量约为2.84μm,工作带宽大于10 kHz.测试结果还表明压电厚膜驱动的微变形镜拥有较高刚度,有利于提高镜面初始平面度.A PZT thick-film actuated micro deformable mirror （DM） was designed and fabricated. The continuous single-crystal silicon membrane was supported and deformed by 61-element PZT actuators. In order to improve the mirror＇s stroke and operating bandwidth, an optimum structural design was accomplished. According to the optimization results a micro DM based on 61-element PZT actuators was trialfabricated using the silicon micro-machining technology. The optimized thickness of the mirror, the PZT layer and the supporting layer is 100 μm, 60 μm and 60 μm, respectively. The space between actuators is 5 mm and the effective aperture is th40 mm. After the fabrication, the micro DM was measured and characterized. The deformation of the micro DM is 2.84μm and the bandwidth of the frequency response is over 10 kHz under a driving voltage of 100 V. It is also shown that the PZT-thick-film actuated micro DM has high rigidity, which is beneficial to the improvement of the initial flatness of the micro DM.

关 键 词：微变形镜 压电厚膜 高刚度 

分 类 号：TN384[电子电信—物理电子学]