基于准分子激光微加工的光热微驱动器(英文)  

Photothermal Microactuator Manufactured by Excimer Laser

作　　者：章海军[1] 赵冬伟[1] 伊福廷[2] 王波[2] 张冬仙[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,杭州310027 [2]中国科学院高能物理研究所,北京100049

出　　处：《纳米技术与精密工程》2011年第5期436-439,共4页Nanotechnology and Precision Engineering

基　　金：国家高技术研究发展计划(863计划)资助项目(2006AA04Z237);国家自然科学基金资助项目(50775205)

摘　　要：提出了基于光热(PT)微膨胀原理的新型光热微驱动技术.设计了一种能将纵向光热膨胀转化成横向偏转的微驱动器.以AutoCAD设计图为基础,采用KrF准分子激光微加工系统,在单层高密度聚乙烯(HDPE)上加工出长1 500μm、宽250μm、厚40μm的开关式光热微驱动器.从微驱动器的扫描电子显微镜(SEM)图可以看出,微驱动器形状与AutoCAD设计值符合良好.光热微驱动实验采用脉冲频率可调的半导体激光器(4 mW,650 nm)作为驱动源.实验结果表明,在一定的脉冲频率范围(如0～17 Hz)内,光热微驱动器具有良好的静态和动态特性,其横向偏转量最大可达11μm,足以实现微开关功能.这种光热微驱动器可由激光束直接控制,具有原理新颖、结构简洁、体积小、易于加工制作等特点,在微纳米技术领域和微光机电系统(MOEMS)中具有广阔的应用前景.This paper proposed a new technique tothermal （PT） expansion. A microactuator that of micro-actuating based on the mechanism of micro phocan convert longitudinal PT expansion into lateral deflection was designed. On the basis of AutoCAD design and controlling, a switch-like PT microactuator with 1 500 μm-length, 250 μm-wldth and 40 μm-thlckness was manufactured by a KrF exclmer laser mlcromachining system using single-layer high-density polyethylene （HDPE）. Scanning electron microscope （SEM） image showed that the manufactured microactuator was in good agreement with the AutoCAD blueprint. Experiments were carried out on the switch-like microactuator using a semiconductor laser （4 mW, 650 nm） with variable pulse frequencies as its actuating source. The results show that, within a certain pulse frequency range （e. g. , 0-17 Hz）, this microactuator demonstrates good static and dynamic characteristics, and its lateral deflection amplitude can reach up to 11 μm, which is sufficient for realizing micro-switching. This kind of microactuator that can be directly controlled by laser beam has a simple structure and a small volume and is easy to manufacture. The technique of PT microactuator may be quite useful for applications in the fields of micro/nano-technology and micro-opto-electromechanlcal systems （ MOEMS）.

关 键 词：光热微驱动器 微加工 微驱动 动态特性 激光 

分 类 号：TH703[机械工程—仪器科学与技术]