Co/C与Co-Pt/C膜的微结构研究  

Microstructure of Co/C and Co-Pt/C Nanogranular Films

作　　者：孙智勇[1] 赵志明[2] 王宝纯[2] 姜宏伟[3] 王艾玲[3] 郑鹉[3] 

机构地区：[1]西安工业大学数理系,西安710032 [2]西安理工大学材料科学与工程学院,西安710048 [3]首都师范大学物理系,北京100037

出　　处：《金属功能材料》2011年第5期33-35,共3页Metallic Functional Materials

摘　　要：利用磁控溅射方法制备Co/C和Co-Pt/C薄膜。用X射线衍射谱(XRD)和透射电子显微镜(TEM)测量样品结构和微观形貌。对Co/C和Co-Pt/C晶粒的大小进行计算,表明Co/C颗粒膜Co是以团簇的形式镶嵌在C层中的,面心立方(fcc)CoPt3和面心四方(fct)CoPt两个稳定有序相在Co-Pt/C薄膜中很好地耦合。In this paper,Co/C and Co-Pt/C thin films have been fabricated by magnetron sputtering.The structure of the films was investigated by X-ray diffraction（XRD）and transmission electron microscope（TEM）.The size of Co/C and Co-Pt/C grains were calculated.It is shown Co in Co/C films is in the form of clusters embedded in C layer.The phase of ordered fcc CoPt3 and fct CoPt phase are existed in Co-Pt/C thin films.

关 键 词：磁记录 磁控溅射 薄膜 

分 类 号：O484.4[理学—固体物理]