用于痕量胺类同系物检测的谐振式微悬臂梁传感器  

Detection of Trace Amine Homologues with Resonant Micro-Cantilever Sensors

作　　者：杨天天[1] 于海涛[1] 许鹏程[1] 李昕欣[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所,传感技术联合国家重点实验室,上海200050

出　　处：《传感技术学报》2011年第9期1233-1237,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(60725414,91023046);973项目(2011CB309503)

摘　　要：采用化学修饰法,将酸性羧基基团嫁接于高比表面的积的SBA-15介孔材料中,然后将该功能化介孔材料负载于集成谐振式微悬臂梁表面,制得一种高性能的挥发性胺类同系物传感器。胺类分子的吸附将导致质量型微悬臂梁传感器谐振频率的下降,传感器检测下限可达ppb量级。对一系列胺类同系物的检测结果表明,胺类分子在羧基功能化介孔表面的吸附程度与其气相碱度强弱有关。Featuring huge specific surface area,synthesized SBA-15 mesoporous silica is functionalized by inner-channel-wall modification of —COOH sensing groups for high-specific amine homologues detection at trace level.With the developed sensing material loaded on resonant micro-cantilever,the specifically adsorbed amine homologue molecules act as an added mass to shift the cantilever resonant-frequency for gravimetric sensing-signal readout.The resonant cantilever sensor experimentally exhibits an ultra-fine detection limit at ppb lever for amine homologue gases.The sensing responses to a series of amine homologues are in accordance with the intensity of their basicties in gas phase.

关 键 词：微电子机械系统 化学传感器 微悬臂梁 介孔材料 胺 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置] O472.4[自动化与计算机技术—控制科学与工程]