微光电子机械系统技术及其应用  

Micro-opto-electro-mechanical systems technologies and applications

作　　者：李红光[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《传感器与微系统》2011年第11期1-3,7,共4页Transducer and Microsystem Technologies

摘　　要：概述微光电子机械系统(MOEMS)技术发展历史,分析其现状。以美国陆军研究开发和工程指挥部的"战略研究规划"中的7个研究领域为例,分析MOEMS技术应用潜力和未来发展趋势。提出现在MOEMS工程遇到的技术挑战:MOEMS加工工艺,达到全反射的光学表面的加工工艺,可与电子线路和MOEMS集成兼容的CMOS半导体材料,MOEMS器件的组装。History and current status of advanced MOEMS technologies is presented. Potential applications and future trends on MOEMS are analyzed based on the strategic research projects in＂ Strategic Research Program＂ made by US Army Research Development and Engineering Command. Current challenges on processing of MOEMS chip, processing of optical surface of micromirrors for high resolution imaging, developing a CMOS processing to he able to integrate the electronic circuit with the MOEMS chip, bulk micromachining process and packaging of MOEMS devices are given.

关 键 词：微光电子机械系统 微电子机械系统 微系统 微结构 小型系统 

分 类 号：TN256[电子电信—物理电子学] TN252