TiAlN/SiO_2纳米多层刀具涂层的微观结构和超硬效应研究  

Investigation of Microstructure and Superhardness Effect of TiAlN/SiO_2 Tool Nanomultilayers

作　　者：王均涛[1] 刘平[1] 杨丽红[1] 李伟[1] 刘新宽[1] 马凤仓[1] 

机构地区：[1]上海理工大学,上海200093

出　　处：《中国机械工程》2011年第22期2757-2761,共5页China Mechanical Engineering

基　　金：上海市科学技术委员会资助项目(08110511600);上海市教育委员会重点学科建设项目(J50503)

摘　　要：通过磁控溅射方法制取了一系列不同SiO2厚度的TiAlN/SiO2纳米多层涂层,并用X射线衍射仪(XRD)、扫描电镜(SEM)、高分辨透射电镜(HRTEM)和纳米压痕仪分别对该涂层的微观结构和力学性能进行了表征和测量。研究表明:当非晶态的SiO2厚度约小于1nm时,SiO2在TiAlN模板作用下转变为晶体结构,并与TiAlN呈共格外延生长,出现超硬效应;当SiO2厚度为0.6nm时,其硬度和弹性模量分别高达37GPa和393GPa;当SiO2厚度超过1nm时,SiO2逐渐转变为非晶结构并且破坏了多层涂层的共格外延生长,硬度随之降低。因此,可以利用该方法制备出机械性能好且耐高温氧化性的刀具涂层,以满足现代切削的需要。A series of TiAlN/SiO2 nanomultilayers with various SiO2 layer thicknesses were synthesized by reactive magnetron sputtering. The microstructure and mechanical properties were evaluated by X-ray diffraction （XRD）, scanning electron microscopy（SEM）, high-resolution transmission electron microscopy（HRTEM） and nano-indentation. The results reveal that, under the template effect of TiALN layers, amorphous SiO2 is forced to crystallize and grow epitaxially with TiALN layers when SiO2 layer thickness is below lnm, and the nanomultilayer appears superhardness effect with the maximum hardness and elastic modulus of 37GPa and 393GPa when SiO2 layer thickness is 0.6nm. As the SiO2 layer thickness exceedes lnm, SiOz transforms into amorphous state and breaks the coherent growth of multilayers, resulting in the decrease of hardness and elastic modulus. Therefore cutter protective coatings which possess better mechanical properties and good oxidation resistance at high temperature are synthesized by this mechanism to meet modern cutting.

关 键 词：超硬效应 TiAlN/SiO2纳米多层涂层 共格外延生长 非晶晶化 

分 类 号：TG115[金属学及工艺—物理冶金]