MOEMS微镜面阵光谱仪的优化设计与实验  

The Optimizing Design and Experiment for a MOEMS Micro-Mirror Spectrometer

作　　者：莫祥霞[1] 温志渝[1] 张智海[1] 郭媛君[1] 

机构地区：[1]重庆大学新型微纳器件与系统技术国家重点学科实验室,光电技术及系统教育部重点实验室,重庆400044

出　　处：《光谱学与光谱分析》2011年第12期3412-3416,共5页Spectroscopy and Spectral Analysis

基　　金：三峡库区环境监测微系统国际科技合作项目(2007DFC00040);国家中央高校基本科研业务专项资金项目(CDJXS10121146);重庆市院士基金项目(CSTC2008BC3002);国家自然科学基金项目(60708017)资助

摘　　要：MOEMS(micro optical electronic mechanical system)微镜面阵光谱仪主要利用微镜面阵分时选通实现单个探测器光谱测量,具有无需斩波器实现脉冲信号输出,无需机械模板实现哈达吗调制,象元分辨率高,体积小,成本低等优点。针对MOEMS微镜面阵光谱仪设计中,狭缝尺寸与光通量之间的矛盾,本文系统深入的分析该光谱仪微型结构引入的新影响因素,获取最优值,实现光谱分辨率改进。首先,提出了衍射限制,空间采样率和谱面内弯曲对分辨率的影响,模拟仿真,获取最优参数。最后,搭建实验,进行测试。结果表明:微型光谱仪中,谱面内弯曲影响较小;衍射受限导致光谱分辨率无法进一步改善;空间采样率要求光谱光学分辨力至少是象元分辨力的两倍;综合评价的狭缝最优值为1.818μm,象元分辨力为2.278 6nm。A MOEMS micro-mirror spectrometer,which uses micro-mirror as a light switch so that spectrum can be detected bya single detector,has the advantages of transforming DC into AC,applying Hadamard transform optics without additional tem-plate,high pixel resolution and low cost.In this spectrometer,the vital problem is the conflict between the scales of slit and thelight intensity.Hence,in order to improve the resolution of this spectrometer,the present paper gives the analysis of the neweffects caused by micro structure,and optimal values of the key factors.Firstly,the effects of diffraction limitation,spatial sam-ple rate and curved slit image on the resolution of the spectrum were proposed.Then,the results were simulated;the key valueswere tested on the micro mirror spectrometer.Finally,taking all these three effects into account,this micro system was opti-mized.With a scale of 70mm×130mm,decreasing the height of the image at the plane of micro mirror can not diminish the in-fluence of curved slit image in the spectrum;under the demand of spatial sample rate,the resolution must be twice over the pixelresolution;only if the width of the slit is 1.818μm and the pixel resolution is 2.278 6μm can the spectrometer have the bestperformance.

关 键 词：分辨率 微镜 光谱仪 MOEMS 

分 类 号：TH744.1[机械工程—光学工程] TH741[机械工程—仪器科学与技术]