Al含量对CrAlN涂层微观结构和力学性能的影响  

Impacts of Al Content on Microstructures and Mechanical Properties of CrAlN Coatings

作　　者：郑康培[1] 刘平[2] 李伟[2] 马凤仓[2] 刘新宽[2] 陈小红[2] 杨丽红[1] 

机构地区：[1]上海理工大学机械工程学院,上海200093 [2]上海理工大学材料科学与工程学院,上海200093

出　　处：《真空科学与技术学报》2011年第6期686-690,共5页Chinese Journal of Vacuum Science and Technology

基　　金：上海市科委资助项目(08110511600);上海市教委重点学科项目(J50503)

摘　　要：采用不同Al含量的AlCr合金靶,在高速钢(M2)上通过直流反应磁控溅射的方式沉积不同的CrAlN涂层;分别用EDS、XRD、纳米压痕仪、高速往复摩擦磨损试验机和台阶仪测量出涂层的化学成分、物相组成、力学性能、磨损性能和磨损量,研究了不同Al含量对CrAlN涂层微观结构和力学性能的影响。XRD分析表明涂层主要为NaCl结构,纳米压痕仪测得力学性能随Al含量的提升先提高后降低,在Al含量为60%时获得最高硬度和弹性模量分别为36.8 GPa和459.5 GPa和最佳的磨损性能。磨损机制为磨料磨损和微动磨损。The CrAlN films were grown by DC reactive magnetron sputtering on high speed steel（M2） substrates.The impacts of the coating conditions on its properties were evaluated,and the microstructures of the CrAlN films were characterized with Xray diffraction（XRD）,scanning electron microscopy（SEM）,energy dispersive spectroscopy（EDS） and conventional mechanical probes.The results show that the Al content of the AlCr target significantly affects the mechanical properties of the NaCl-type cubic-structured CrAlN films.As Al content increases,the variations in the hardness and elastic modulus of the film follow an increase-decrease pattern.At an optimized Al content of 60%（at）,its maximum hardness and modulus were estimated to be 36.8 GPa and 459.5 GPa,respectively.In addition,the highest wear resistance was observed,and the abrasive wear and fretting wear were identified as the major mechanisms

关 键 词：磁控溅射 CrAlN涂层 AL含量 力学性能 磨损机制 

分 类 号：TB43[一般工业技术]