特种硬质薄膜的抗氧化性研究  

Study of the oxidation resistance of CrN_x hard coating

作　　者：孙爱祥[1] 赵广彬[1] 张馨元[1] 蒙志林[1] 栾道成[1] 

机构地区：[1]西华大学材料科学与工程学院,四川成都610039

出　　处：《真空》2011年第6期32-34,共3页Vacuum

基　　金："高档数控机床与基础制造装备"科技重大专项资助(2009ZX04012-23);四川省特种材料及制备技术重点实验室经费资助

摘　　要：采用热阴极离子镀膜技术制备了CrNx薄膜。用XRD和XPS对氧化后试样的相结构和成分进行了研究,分析了高温氧化后薄膜的物相、成分变化对薄膜抗氧化性能的影响。结果表明在700℃薄膜中形成了完整的Cr2O3氧化膜,此时薄膜抗氧化性能较佳。CrNx hard films were prepared by hot cathode ion plating technology. The phase structure and composition of the films oxided at different temperatures were investigated by X-ray diffraction and X-ray photoelectron spectroscopy in an effort to understand the film oxidation resistance. The results show that an integrated Cr2O3 oxide film was formed at 700℃, which played a good role in high temperature oxidation resistance.

关 键 词：CRNX薄膜 热阴极离子镀 抗氧化性 XRD XPS 

分 类 号：TG174.444[金属学及工艺—金属表面处理]