大面积PET基中频反应磁控溅射沉积TiN隔热薄膜实验研究  

Experimental study of heat insulation TiN film deposited on large-area PET substrate by MF reactive magnetron sputtering

作　　者：翟玉涛 戴彬[1] 王军生[1] 韩大凯 王治安[1] 

机构地区：[1]核工业西南物理研究院,四川成都610041

出　　处：《真空》2011年第6期40-45,共6页Vacuum

摘　　要：本文讨论在柔性基材PET上沉积氮化钛(TiN)阳光控制膜——作为隔热薄膜。"隔热"是指对红外光区的有效阻隔。氮化钛(TiN)薄膜具有光谱选择透过性,因此可以作为阳光控制薄膜使用。实验采用中频孪生靶磁控溅射实验装置,在等离子体辐射监视系统(PEM)的控制下,在大面积PET柔性基材上沉积TiN隔热薄膜。实验主要研究了制备不同透光率的PET基TiN隔热膜并观察薄膜表面状况;对沉积的TiN薄膜用分光光度仪进行光谱透过率分析并计算各种透过率薄膜的光学性能参数,比较不同透过率的隔热效果;为了对该隔热薄膜的化学稳定性进行分析,还做了耐酸碱性测试。通过本实验为以后的大规模工业产业化发展奠定良好的基础。This article studied the depositing TiN film on PET substrate as window film which can effectively insulate the infrared light. As TiN film has spectrum permselectivity, it can be used to control solar energy, During the experiment, MF twin target magnetron sputtering system was used to deposite the TiN film on large area PET under the control of PEM（plasma emission monitoring）. The transmittance of TiN films were analyzed by spectrophotometer and the .optical parameters were calculated to compare the insulation effects with different transmittance. The test of resistingt acid and alkali was done in order to analyze the chemical stability of the films. This work may lay a good foundation for furter industrial development.

关 键 词：阳光控制 TiN隔热膜 等离子体辐射监视系统 反应溅射 

分 类 号：TB43[一般工业技术]