基于介电泳机理的金纳米颗粒传感器装配方法  

Fabrication Method of Gold Nanoparticle Sensors Based on the DEP Mechanism

作　　者：王淑娥[1,2] 曲艳丽[1] 董再励[1] 杨洋[1] 周磊[1] 

机构地区：[1]中国科学院沈阳自动化研究所机器人学国家重点实验室,沈阳110016 [2]中国科学院研究生院,北京100049

出　　处：《微纳电子技术》2011年第12期809-815,共7页Micronanoelectronic Technology

基　　金：机械人学国家重点实验室自主课题(2009Z02);中国科学院;国家外国专家局创新团队国际合作伙伴计划资助项目

摘　　要：研究了一种基于介电泳机理的金纳米颗粒传感器装配方法。在分析介电泳工作原理的基础上,利用Comsol Multiphysics仿真软件,对平面微电极条件下所产生的空间电场进行了建模仿真,研究了金纳米粒子极化模型及相关介电泳频谱特性。设计加工了基于光刻标准工艺和引线键合技术的平面微电极阵列,构建了具有三维位移平台和视频监控装置的介电泳装配实验平台。以250nm金颗粒为实验对象,在理论分析基础上,完成了在微电极阵列上的介电泳组装实验研究,并通过电特性测量验证了组装结果。实验结果表明:金纳米颗粒的介电泳组装效果与介质溶液的电导率、电场频率和幅度、金纳米粒子浓度、电极间隙及作用时间有关,在适宜的条件下,采用介电泳技术可实现对金纳米颗粒的有效操控和纳米器件装配,该方法为纳米传感器的制造提供了一种有效途径。A fabrication method of gold nanoparticle sensors based on the dielectrophoresis （DEP） technology was proposed. Based on the theoretical analysis of the DEP working principle, the distribution of the non-uniform spacial electric field generated by planar micro electrode pairs was simulated using Comsol Muhiphysics. The polarizing model and frequency spectrum characteristics of gold nanoparticles DEP were also investigated. Moreover, a series of planar micro electrode pairs with different gaps were successfully designed and fabricated with standard photo- lithography technique and wire bonding technique. An experimental setup for gold nanoparticles assembly was established, including the three-dimensional motor-driven platform module and visual monitoring module. Specifically, based on the theoretical analysis, DEP assembly experiments of 250 nm gold nanoparticles between the gap of micro electrode pairs were investigated. Then the electrical properties of the gold nanoparticle based sensor was measured and the effectiveness of the DEP assembly was validated. Experimental results indicate that the effectiveness of DEP assembly for gold nanoparticles dependens on the medium conductivity, the frequency and amplitude of the applied AC voltage, concentration of gold nanoparticles, electrode gap and duration time. Therefore, DEP technique can realize effective manipulation and assembly of gold nanoparticles at optimal conditions, which provides an effective approach for assembly and fabrication of nano sensors.

关 键 词：介电泳(DEP) 光刻技术 金纳米颗粒 纳米传感器 纳米器件的组装与装配 

分 类 号：TB383[一般工业技术—材料科学与工程] TP212[自动化与计算机技术—检测技术与自动化装置]