热丝辐射距离和W-C梯度过渡层对高速钢基体气相生长的影响  

Effect of filament radiation length and W-C gradient interlayer on diamond films deposited on high-speed steel

作　　者：魏秋平[1,2] 余志明[1] 陈中[1] 朱笑东[1] 刘培植[1] 

机构地区：[1]中南大学材料科学与工程学院,长沙410083 [2]中南大学粉末冶金国家重点实验室,长沙410083

出　　处：《中国有色金属学报》2011年第11期2825-2837,共13页The Chinese Journal of Nonferrous Metals

基　　金：湖南省研究生创新基金资助项目(1343-74236000005);粉末冶金国家重点实验室开放基金资助项目(2008112048);中南大学优秀博士论文扶持基金资助项目(2008yb015);中南大学贵重仪器开放共享基金资助项目(ZKJ2008001)

摘　　要：使用反应磁控溅射技术在W18Cr4V高速钢基体表面制备W-C梯度过渡层(WCGC),采用热丝化学沉积法(HFCVD),以甲烷和氢气为反应气体,在基体表面生长金刚石膜。采用场发射扫描电子显微镜(FE-SEM)、X射线衍射仪(XRD)和激光拉曼光谱(Raman)对W-C过渡层和金刚石膜进行检测分析,研究热丝辐射距离和沉积气压对WCGC与金刚石膜的的影响。结果表明:热丝辐射距离对金刚石薄膜和WCGC均有较大影响;WCGC过渡层能够在一定热丝辐射范围内降低Fe在金刚石膜沉积过程的负面影响,有效提高金刚石的形核率,在基体表面得到连续致密的金刚石膜。The diamond films were grown on W18Cr4V high-speed steel substrates by hot filament chemical vapour deposition methods.A tungsten-carbide gradient coating（WCGC） prepared by reactive sputtering was used as an intermediate layer on the high-speed steel substrates to minimize the early formation of graphite（and thus the growth of low quality diamond films） and enhance the diamond film adhesion.The effects of the filament radiation length and deposition pressure on WCGC interlayer and the nucleation,growth and quality of diamond film were investigated.The results show that the diamond films make a huge improvement on the nucleation and quality by WCGC interlayer,the filament radiation length have a very important influence on the phase transformation of WCGC interlayer.

关 键 词：金刚石膜 高速钢 化学气相沉积 过渡层 热丝辐射距离 

分 类 号：TB43[一般工业技术]