一种复合调整型精密高压电源  

A Precision High-voltage Power Supply with Compound Regulation Mode

作　　者：陈振生[1] 刘伯强[2] 殷淑霞[1] 祁爽[1] 

机构地区：[1]山东凯文科技职业学院电工电子实训中心,山东济南250200 [2]山东大学控制科学与工程学院,山东济南250061

出　　处：《现代电子技术》2011年第24期14-17,共4页Modern Electronics Technique

摘　　要：为保证电子束曝光机用高压电源既有高静态精度,又有高动态稳定性,采用直接调整和间接调整相结合的复合调整方案,同时采用集中补偿和分散补偿相结合的复合补偿方案。为实现高压稳压电源系统的高精密、高稳定和低纹波电压等技术指标,采取了多项合理的特定电路设计和有效的技术处理措施。通过各项性能指标的测试和长期实际工作运行,证明各项技术指标均达到或超过原设计要求,保证了电子束曝光机的制版精度。In order to ensure the high static accuracy and the high dynamic stability of high-voltage power supply used for elctron beam exposure apparatus,two schemes of compound regulation（in combination with direct regulation and indirect regulation） and compound compensation（in combination with centralized compensation and dispersed compensation） are adopted in the high-voltage powe supply.Some reasonable circuit design items and effective processing measures are used to guarantee the achievement of high stabiliy and the low ripple voltage.The testing of the performace indexes and the practical usage show that the power supply can satisfy the high precision requivements of the electron beam exposure apparatus.All of its performance indexes can reach or exceed the original design reqirements.

关 键 词：电子束曝光机 高压电源 制版精度 复合补偿 

分 类 号：TN710-34[电子电信—电路与系统] TM46[电气工程—电器]